We report about microscopic study of electrical transport of polyc/ystalline Silicon (poly-Si) thin films for solar cells produced by very high frequency (VHF) plasma enhanced chemical vapor deposition using a conductive scanning probe microscope (SPM) technique. Surface morphologv and local current images are simultaneously measured. for the poly-Si layers with a thickness, d. in the ran…
Materials stress under such irradiation can be found in space craft and industrial electronics. This paper introduces the use of a scanning electron microscope (SEM) to evaluate the insulation property of insulators An SEM may be used not only to observe a surface image but also to provide a fine electron beam for charging an uncoated-insulator surface at …