Microscopic Study Of Electrical Transport Of Polycristalline Silicon Thin Fil…

We report about microscopic study of electrical transport of polyc/ystalline Silicon (poly-Si) thin films for solar cells produced by very high frequency (VHF) plasma enhanced chemical vapor deposition using a conductive scanning probe microscope (SPM) technique. Surface morphologv and local current images are simultaneously measured. for the poly-Si layers with a thickness, d. in the ran…