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Found 1 from your keywords: subject="Polycristalline Silic...
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Microscopic Study Of Electrical Transport Of Polycristalline Silicon Thin Fil…
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Haruman, EsaAzferiMuhida, RizaGeter, Agus

We report about microscopic study of electrical transport of polyc/ystalline Silicon (poly-Si) thin films for solar cells produced by very high frequency (VHF) plasma enhanced chemical vapor deposition using a conductive scanning probe microscope (SPM) technique. Surface morphologv and local current images are simultaneously measured. for the poly-Si layers with a thickness, d. in the ran…

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